V. Lashkaryov Institute of Semiconductor Physics of National Academy of Sciences of Ukraine
Search
Nav view search
Navigation
Home
Institute
Research divisions
Projects
Our design
Education
News
Journal
Mail
You are here:
Home
Our design
Publications
dep15
dep-15-before
Электронно-лучевой отжиг имплантированных слоев кремния в структурах SiO2-Si
Devices
Diagnostics
Technology
Services
Details
Hits: 7099
А.Н. Назаров, В.С. Лысенко, Т.Е. Руденко, С.Н. Ячменев и др.// УФЖ, т.31, №3, C. 434-438 (1986)