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Anatolii N. Lukianov, Nickolai I. Klyui, Bo Sha, Volodymyr B. Lozinskii,Volodymyr P. Temchenko, Liubov V. Avksentyeva, Vasyl S. Staschuk //Journal of Alloys and Compounds 801(2019) 285-294.
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V. Lashkaryov Institute of Semiconductor Physics of National Academy of Sciences of Ukraine
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Research divisions Publications lab09-2 lab09-2-2019 Effect of discharge power and silicon content on optical andmechanical properties of carbon-rich amorphous silicon carbidefilms obtained by PECVD.
Research divisions Publications lab09-2 lab09-2-2019 Effect of discharge power and silicon content on optical andmechanical properties of carbon-rich amorphous silicon carbidefilms obtained by PECVD.