V. Lashkaryov Institute of Semiconductor Physics of National Academy of Sciences of Ukraine
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Formation of Shallow n-p Junctions in Cz-Si Low-Energy Implantation of Carbon Ions
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Romanyk B., Melnik V., Popov V., Litovchenko V., Babich V., Il′chenko V., Kladko V., and Vanhellemont J. // ECS Transactions. 2014 – V. 64, N 11. – P. 187-198. The Electrochemical Society