Fabrication and characterization of nickel silicide ohmic contacts to n-type 4H Silicon Carbide

V. Lashkaryov Institute of Semiconductor Physics of National Academy of Sciences of Ukraine

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Fabrication and characterization of nickel silicide ohmic contacts to n-type 4H Silicon Carbide

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A. Kuchuk, V. Kladko, M. Guziewicz, A. Piotrowska, R. Minikayev, A. Stonert, R. Ratajczak // Journal of Physics: Conference Series V.100. Issue 4. (042003), (2008).

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