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O. L. Stroyuk, V. M. Dzhagan, A. V. Kozytskiy, A. Ya. Breslavskiy, S. Ya. Kuchmiy, A. Villabona, D. R.T. Zahn // Materials Science in Semiconductor Processing. 37 (2015) 3-8. DOI: 10.1016/j.mssp.2014.12.033