Photoluminescence and paramagnetic defects in silicon-implanted silicon dioxid layers

V. Lashkaryov Institute of Semiconductor Physics of National Academy of Sciences of Ukraine

V. Ya. Bratus’, M. Ya. Valakh, A. A. Konchits, V. A. Yukhimchuk // Proc. Intern. Conf. “E-MRS-1998”, Strasbourg (France), P. B-30 (1999)

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