Optical diagnostics of light-emitting Si-clusters in SiO2 formed by ion implantation

V. Lashkaryov Institute of Semiconductor Physics of National Academy of Sciences of Ukraine

M. Ya. Valakh, V. A. Yukhimchuk, V. Ya. Bratus’, A. N. Nazarov, P. L. F. Hemment, T. Komoda // SPIE Proc. Ser. V. 3359, P. 277-281 (1998)

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