Diagnostics of nitrogen- implanted diamond-like carbon films by optical and microhardness measurements

V. Lashkaryov Institute of Semiconductor Physics of National Academy of Sciences of Ukraine

V. V. Artamonov, M. Ya. Valakh, B. N. Romanyuk, N. I. Klyui, A. Perez-Rodriguez, V. A. Semenovich // Proc. SPIE, V. 3359, P. 339-346 (1998)

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