- Details
- Parent Category: dep06
- Hits: 8760
A.N. Nazarov, V.O. Yukhymchuk, Y.V. Gomeniuk, S. Kryvyi, P.N. Okholin, P.M. Lytvyn, V.P. Kladko, V.S. Lysenko, V.I. Glotov, I.E. Golentus, E. Napolitani, R. Duffy // Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics.35, 051203 2017