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Silicon pressure sensors with separating diaphragm

№25 Laboratory anisotropic semiconductors
    S.І. Kozlovsky

CHARACTERISTICS:

* Absolute, Differential and Gage measurement.
* Operating Pressure Range   (kPa):                      0-40, 0-100, 0-200, 0-400, 0-600, 0-1000, 0-1500, 0-4000, 0-6000.
* Supply Voltage (V):                                                   6
* Full-scale Span (mV):                                               50±10
* Operating Temperature Range:                        -  400 С - +800 С
* Temperature Effect on Span (less,%):                         ±0,2
* Temperature Effect on Offset    (less,%):                    ±0,2
* High Linearity, Long Term Stability of Offset and Span.